JPS645881Y2 - - Google Patents
Info
- Publication number
- JPS645881Y2 JPS645881Y2 JP7261383U JP7261383U JPS645881Y2 JP S645881 Y2 JPS645881 Y2 JP S645881Y2 JP 7261383 U JP7261383 U JP 7261383U JP 7261383 U JP7261383 U JP 7261383U JP S645881 Y2 JPS645881 Y2 JP S645881Y2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- nozzle
- cleaned
- samples
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 48
- 239000007788 liquid Substances 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 17
- 238000000034 method Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 6
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000008213 purified water Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 238000001223 reverse osmosis Methods 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7261383U JPS59177940U (ja) | 1983-05-16 | 1983-05-16 | 洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7261383U JPS59177940U (ja) | 1983-05-16 | 1983-05-16 | 洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59177940U JPS59177940U (ja) | 1984-11-28 |
| JPS645881Y2 true JPS645881Y2 (en]) | 1989-02-14 |
Family
ID=30202748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7261383U Granted JPS59177940U (ja) | 1983-05-16 | 1983-05-16 | 洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59177940U (en]) |
-
1983
- 1983-05-16 JP JP7261383U patent/JPS59177940U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59177940U (ja) | 1984-11-28 |
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